Integrating a Wafer Heater Into Compact OEM Assemblies

https://mica-heater-journal.cloudhinter.com/posts/what-determines-the-heating-performance-of-an-ito-glass-heater

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result