How Ramp Rate and Thermal Cycling Affect a Wafer Heater Application

https://heater-engineering-hub.clearminster.com/posts/semiconductor-heater-design-factors-for-vacuum-and-process-equipment

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result