From Prototype to Production: Scaling a Custom Mica Heater Project

https://precision-heating-elements.summitviewdaily.com/posts/semiconductor-heater-solutions-for-etching-and-process-equipment

In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result